Learn More about Semiconductor Metrology at NIST

This publication provides summaries of NIST’s metrology projects for the silicon semiconductor industry and their suppliers of materials and manufacturing equipment. Each project responds to one or more metrology requirements identified by the industry in sources such as the ITRS. NIST is committed to listening to the needs of industry, working with industry representatives to establish priorities, and responding where resources permit with effective measurement technology and services. For further information, please contact NIST as follows:

Office of Microelectronic Programs
National Institute of Standards and Technology
100 Bureau Drive
Building 225, Room A317, Mail Stop 8101
Gaithersburg, MD 20899-810

Telephone:  (301) 975-4400
Fax:  (301) 975-6513
e-mail:  nsmp@nist.gov