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Managing a NIST-wide metrology
development effort addressing the measurement needs of the
semiconductor industry and its supporting infrastructure.
Office of Microelectronics Programs
Building 225, Room A317, MS 8101
100 Bureau Drive
Gaithersburg, MD 20899-8101
301-975-4400 Telephone
301-975-6513 Fax
nsmp@nist.gov
01/24/2005
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