Nano-Structures for CD and Interconnect Metrology
Implementation of Simulation Program for Modeling the Effective Resistivity of Nanometer Scale Film and Line Interconnects, NISTIR 7234*
Download the java source code described in the document.
The Java Compiler used in the development of this code is the J2SE v1.4.2_08 SDK, which is available for free download. There are installation instructions on the website, if needed.
The jGRASP editor was used in the writing of this code. This editor is available for free download.
The instructions for executing the code using your desired variables are detailed in NISTIR 7234.
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