Research Projects/Facilities
ENABLING DEVICES AND ICS GROUP
- Nano-Structures for CD and Interconnect Metrology
- Metrology for System-on-a-Chip
- Power Device and Thermal Metrology
- Micro-Nano-Technology (MNT)
- Nanobiotechnology
- Wire Bonding to Cu/Low-k Semiconductor Devices
- Advanced MOS Device Reliability and Characterization
- Macro Electronics
- Nanoelectronic Device Metrology
- Theoretical Solid-State Physics for Semiconductors
ELECTRONIC INFORMATION GROUP