Standard Reference Materials
Silicon Resistivity SRMs
The Semiconductor Electronics Division of NIST provides Standard Reference Materials (SRMs) for bulk silicon resistivity through the NIST Standard Reference Materials Program. An improved set of resistivity SRMs, on 100 mm wafers, is now available. These wafer SRMs improve upon the earlier 50 mm diameter SRM sets 1521, 1522, and 1523.
The new SRMs have similar values of nominal resistivity as the earlier set, but offer improved uniformity and substantially reduced uncertainty of certified values due both to material and procedural improvements. The most significant feature of the new SRMs is in their certification, which is performed using a dual-configuration four-probe measurement procedure rather than the single-configuration measurements specified in ASTM F84. Extensive testing has shown that the dual-configuration procedure reduces random variations of measurement and probe-to-probe differences.
Technical insights presented by the rigorous certification process are available in NIST Special Publication 260-131, Standard Reference Materials: The Certification of 100 mm Diameter Silicon Resistivity SRMs 2541 through 2547 Using Dual-Configuration Four-Point Probe Measurements. Individual data for each wafer are supplied along with the SRM certificate.
NIST sells SRMs on an as-available basis. For technical information, contact: James Ehrstein.
Contact to order SRMs:
Standard Reference Materials Program
Customer Relations Department
Building 202, Room 204
National Institute of Standards and Technology
Gaithersburg, MD 20899-0001
Phone: (301) 975-6776
Fax: (301) 948-3730
e-mail
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