m  m  ,5n1CMOS.Thickness.Regular_LEDIT_12.22.0@;k_j g g 5SawMarkers .,ddddd .,dd(( 1,dd 1,dd((g  g +2 .,PP .,<<P<P<<< .,xPxPx .,<P<PPP< .,PPg  g  Arrow .,$$ .,"" .,   ., ., ., .,    .,    .,  .,   ., ., .,  .,ddm m TS2lesslabel SawMarkers d SawMarkers d 2 LD 2 PD Arrow D Arrow &D Arrow D Arrow D .,66 8,0  0000  +,00 1,4*4*4 1,HH** 1,,,** 3,** 4,(((g  g 71 .,m )m "TS1lesslabel SawMarkers d SawMarkers d 1 xD 1 D Arrow D Arrow D Arrow D Arrow D .,.. 8,2FF22 +,$$00$ +,** +,(( +,.. 1,J``JJ 3,  **  4,m -m LabelThicknessSmR .,F0Z0ZDFDF0 .,<:P:PNP>P<<> .,zPzPz .,>P>PRR> .,zzz .,PP .,.<.>   1, .   . . 1,pp 1,l  0l  0&Labels1to4 4  3 & 2 B 1 ^k '(k  ffb348ox +,ff`` +,ff +, t\t\  t +, \\  3,`` 3, 3, 3,`` -,jfjfj -,ff ,ff`` ,ff 2,ff`` 2,ff 4,ff`` 4,ffh ;%h 48 8 d 4 k 6!k 7 348 3  48 dg  g  F .,<<<<PP< .,xPxPx .,g g FF F d F k (7k LabelFF348 4 L 348  dash < FF  dash <k 'l  :Arrayffb348 Labels1to4 L ffb348ox x ffb348ox  ffb348ox  LabelFF348  ffb348ox k !k $ ffb248ox +,ll`` +,ll +, tbtb  t +, bb  3,`` 3, 3, 3,`` -,jljlj -,ll ,ll`` ,ll 2,ll`` 2,ll 4,ll`` 4,llk %k .248 48 d 2 k k 7LabelFF248 2 L 248  dash < dash < FF k  l  8(Arrayffb248 Labels1to4 L ffb248ox x ffb248ox  ffb248ox  LabelFF248 d ffb248ox h 8(k  ffb400ox +,`` +, +, tt  t +,   3,88`` 3,88 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h h 4400 4  0  0 dh 5 k .LabelFF400 5  400  dash |< FF  dash d<h 4l  :Arrayffb400 Labels1to4 L* ffb400ox  ffb400ox  ffb400ox  ffb400ox  LabelFF400 h*"k  ffb300ox +,`` +, +, tt  t +,   3,>>`` 3,>> 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h(k )LabelFF300 3  300  dash |< FF  dash d<h(l  8Arrayffb300 Labels1to4 L* ffb300ox  ffb300ox  ffb300ox  ffb300ox  LabelFF300 h #k  ffb200ox +,`` +, +, tt  t +,   3,DD`` 3,DD 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h 1k  LabelFF200 1  200  dash (< dash @< FF xh l  7Arrayffb200 Labels1to4 LV ffb200ox  ffb200ox  ffb200ox  ffb200ox < LabelFF200 l  (7l  )can348oxR +,LLBB +,~~ +,BB +,VVttV +, +,tt 3,BB 3,xx 3,BB -,LL~~L -, -,~~ ,LLBB ,~~ ,BB 2,LLBB 2,~~ 2,BB 4,LLBB 4,~~ 4,BBk 4k 2 can348ox +,f`f`f +, +,`` +, tt  t +,   +, 3,`` 3, 3,`` -,jjj -, -, ,f`f`f , ,`` 2,f`f`f 2, 2,`` 4,f`f`f 4, 4,``k 53k 0 Label348 4  348  dash d<k 3$l  +"Arraycan348 can348oxR x can348oxR  can348oxR  Labels1to6 L can348ox  can348ox  Label348  can348ox l   l  can248oxR +,LLBB +,~~ +,BB +,VVttV +, +,tt 3,BB 3,xx 3,BB -,LL~~L -, -,~~ ,LLBB ,~~ ,BB 2,LLBB 2,~~ 2,BB 4,LLBB 4,~~ 4,BBk !k can248ox +,l`l`l +, +,`` +, tt  t +,   +, 3,  `` 3, 3,`` -,jjj -, -, ,l`l`l , ,`` 2,l`l`l 2, 2,`` 4,l`l`l 4, 4,``k $!k 4 Label248 2 L 248  dash <k l  $Arraycan248 can248oxR x can248oxR  can248oxR  Labels1to6 L can248ox  can248ox  Label248 , can248ox l  ,l  -can400oxR +,LLBB +,44~~ +,44BB +,V*V*ttV +,** +,tt 3,BB 3,\x\x\ 3,\B\B\ -,L4L4~~L -,44 -,~~ ,LLBB ,44~~ ,44BB 2,LLBB 2,44~~ 2,44BB 4,LLBB 4,44~~ 4,44BBh k 0 can400ox +,44`` +,44 +,44`` +, tftf  t +, ff  +,HffHH 3,t`t`t 3, 3,`` -,jpjpj -,pp -,>pp>> ,44`` ,44 ,44`` 2,44`` 2,44 2,44`` 4,44`` 4,44 4,44``h  k 8 Label400 5  400  dash d<h l  /Arraycan400 can400oxR  can400oxR  can400oxR  Labels1to6 L, can400ox  can400ox  Label400 " can400ox .l  l  can200oxR +,LLBB +,@@~~ +,@@BB +,V6V6ttV +,66 +,tt 3,BB 3,hxhxh 3,hBhBh -,L@L@~~L -,@@ -,~~ ,LLBB ,@@~~ ,@@BB 2,LLBB 2,@@~~ 2,@@BB 4,LLBB 4,@@~~ 4,@@BBh &k : can200ox +,@@`` +,@@ +,@@`` +, trtr  t +, rr  +,TrrTT 3,`` 3, 3,`` -,j|j|j -,|| -,J||JJ ,@@`` ,@@ ,@@`` 2,@@`` 2,@@ 2,@@`` 4,@@`` 4,@@ 4,@@``h k 2 Label200 1 < 200  dash d<h 'l  Arraycan200 can200oxR  can200oxR  can200oxR  Labels1to6 L, can200ox  can200ox  Label200 F can200ox .k k 2LabelYoungsModulus W28  lF .,(( ., .,xxx .,ddd ., ., ., ., ., ., ., ., ., .,ZZZ ., T | | T T ., x x   x ., | |( (  ., x |x | x ., | |   .,    .,  < <   .,  ( (  ., L t t L L ., L ( L( L ., $ $ ., ., $ $(( .,(( ., .,4\\44 ., .,\\(( .,\\ .,lll ., .,(( ., .,xLxLx .,$LL$$ ., .,LL .,LL(( ., ( (  .,44 .,\\\ ., 44   ., .,lll ., .,(( ., .,,TT,, .,,(,(, .,,,, ., .,txxttx .,t(t(t .,txxttx .,ttt .,FnnFF .,<dd<< .,2ZZ22 ., 22   .,<< .,FF .,(PP(( .,(( .,PxxPP .,TTT .,|| ., .,T||TT .,,, .,nnn .,k -l  )YoungsModulus Arraycan300 \J SawMarkers2 4 SawMarkers2 j SawMarkers2  Arrayffb348  6 Arrayffb248 t6 Arrayffb400  Arrayffb300 \ Arrayffb200  Arraycan348   Arraycan248 t Arraycan400 J Arraycan200 J LabelYoungsModulus @ .,bbb .,  ., -,((l  l  5can400oxW40R +,LL`` +,44~~ +,44`` +,t*t*t +,** +,tt 3,`` 3,\x\x\ 3,\`\`\ -,j4j4j -,44 -, ,LL`` ,44~~ ,44`` 2,LL`` 2,44~~ 2,44`` 4,LL`` 4,44~~ 4,44``l  #l  6.Labels1to6s 6  5 : 4 t 3  2  1  ,k 3k ;6can400oxW40 +,44`` +,44~~ +,44`` +, tftf  t +, ff  +,HfftHtH 3,t`t`t 3,xx 3,`` -,jpjpj -,pp -,>pp>> ,44`` ,44~~ ,44`` 2,44`` 2,44~~ 2,44`` 4,44`` 4,44~~ 4,44``k 3l  9+Arraycan400W40 can400oxW40R  Labels1to6s Lp can400oxW40R < can400oxW40R x Label400 J  can400oxW40  , can400oxW40  can400oxW40 l  0l  can348oxW40R +,LL`` +,~~ +,`` +,ttt +, +,tt 3,`` 3,xx 3,`` -,jjj -, -, ,LL`` ,~~ ,`` 2,LL`` 2,~~ 2,`` 4,LL`` 4,~~ 4,``k 1;k ::can348oxW40 +,f`f`f +,~~ +,`` +, tt  t +,   +,tt 3,`` 3,xx 3,`` -,jjj -, -, ,f`f`f ,~~ ,`` 2,f`f`f 2,~~ 2,`` 4,f`f`f 4,~~ 4,``k 1(l  9Arraycan348W40 can348oxW40R  Labels1to6s Lp can348oxW40R < can348oxW40R x Label348   can348oxW40  , can348oxW40  can348oxW40 l  l  -can300oxW40R +,LL`` +,::~~ +,::`` +,t0t0t +,00 +,tt 3,`` 3,bxbxb 3,b`b`b -,j:j:j -,:: -, ,LL`` ,::~~ ,::`` 2,LL`` 2,::~~ 2,::`` 4,LL`` 4,::~~ 4,::``k 0k 9'can300oxW40 +,::`` +,::~~ +,::`` +, tltl  t +, ll  +,NlltNtN 3,z`z`z 3,xx 3,`` -,jvjvj -,vv -,DvvDD ,::`` ,::~~ ,::`` 2,::`` 2,::~~ 2,::`` 4,::`` 4,::~~ 4,::``k /;l  9Arraycan300W40 can300oxW40R  Labels1to6s Lp can300oxW40R < can300oxW40R x Label300   can300oxW40  , can300oxW40  can300oxW40 l  l   can248oxW40R +,LL`` +,~~ +,`` +,ttt +, +,tt 3,`` 3,xx 3,`` -,jjj -, -, ,LL`` ,~~ ,`` 2,LL`` 2,~~ 2,`` 4,LL`` 4,~~ 4,``k .0k 8can248oxW40 +,l`l`l +,~~ +,`` +, tt  t +,   +,tt 3,  `` 3,xx 3,`` -,jjj -, -, ,l`l`l ,~~ ,`` 2,l`l`l 2,~~ 2,`` 4,l`l`l 4,~~ 4,``k .l  8Arraycan248W40 can248oxW40R  Labels1to6s Lp can248oxW40R < can248oxW40R x Label248 @  can248oxW40  , can248oxW40  can248oxW40 l  5l  #can200oxW40R +,LL`` +,@@~~ +,@@`` +,t6t6t +,66 +,tt 3,`` 3,hxhxh 3,h`h`h -,j@j@j -,@@ -, ,LL`` ,@@~~ ,@@`` 2,LL`` 2,@@~~ 2,@@`` 4,LL`` 4,@@~~ 4,@@``k ,%l #can200oxW40 +,@@`` +,@@~~ +,@@`` +, trtr  t +, rr  +,TrrtTtT 3,`` 3,xx 3,`` -,j|j|j -,|| -,J||JJ ,@@`` ,@@~~ ,@@`` 2,@@`` 2,@@~~ 2,@@`` 4,@@`` 4,@@~~ 4,@@``k +6l  6Arraycan200W40 can200oxW40R  Labels1to6s Lp can200oxW40R < can200oxW40R x Label200 (  can200oxW40  , can200oxW40  can200oxW40 k 4k 2LabelStrainGradient W40  pF ., ( (  ., .,HxxHHx .,    .,(( .,  0 0   .,    .,  ( (  ., @ @   ., h  h h .,  @ @   .,    ., .,H(H(H .,HHH .,   ., .,x x x .,   .,@@ ., .,xxx .,x(x(x .,(( .,xxx ., .,>pp>> .,>pp(>(> .,   ., .,x x x .,   .,& N N2&2&  .,DD<< .,::FF .,FFnnF .,<<dd< .,2&2&ZZ2 .,(0(0PP( .,PPxxP .,0XX(0(0 .,0xXxX00x .,xXxXx .,XX ., ., .,HppHH .,H(H(H .,HHH .,(( .,888 ., ., .,8``88 .,hhh ., .,(( .,@xx@@x ., ., ( (  ., x (x (  x ., ( (  ., x xx x x .,    .,& N N2&2&  .,DD<< .,::FF .,FFnnF .,<<dd< .,2&2&ZZ2 .,(0(0PP( .,PPxxP .,0XX(0(0 .,0xXxX00x .,xXxXx .,XX ., ., `  ` ` .,  ( (  .,    k 1l  StrainGradient Arraycan400W40  Arraycan348W40   Arraycan300W40 R Arraycan248W40 j Arraycan200W40  LabelStrainGradient ~ SawMarkers2 < SawMarkers2 L .,(( ., .,(( -,bbbk ,2k LabelResidualStrain W40  F .,xxx ., HH  ., ( (  ., xx x .,    .,(( .,    ., x @ @( x( x ., x @ @ x x ., ( P P ( ( .,    ., x Px P x ., P P   .,HppHH ., ., .,0xXxX00x .,0(0(0 .,0xx00x .,000 .,>pp>> .,>pp(>(> .,PxxPP ., .,xxxxx .,xx ., V ~ ~2 V2 V  ., L t t< L< L ., B j jF BF B ., F BF Bn n F ., $< L< Ld $d $< ., .2 V2 VZ .Z .2 ., 8( `( `P 8P 8( ., P 8P 8x x P ., ` ( `( ` ., `x x  ` `x .,x x x .,  .,   ., .,HppHH .,H(H(H .,HHH ., 0 0( (  ., h  h h .,  0 0   .,    ., h  h h ., .,88 .,(( ., .,@@(( .,00 .,xxx .,00(( .,x0x0x .,00 ., .,xxx .,hh(( .,x@x@x .,hh .,n 2n2n  .,d<d<d .,ZFZFZ .,2FZFZn2n2F .,<<d<dd<d<< .,F2n2nZFZF2 .,P(x(xPPPP( .,(PPPPx(x(P .,x(x(x .,xxxxxx .,xxx ., .,(( ., .,X  (X(X .,X  XXl  +l  7Labels1to3s 3  2  1 k 3k 5 ffb400oxW40 +,`` +,~~ +, tt  t +,   3,88`` 3,88xx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k l  3;Arrayffb400W40 Labels1to3s Lt LabelFF400   ffb400oxW40  ffb400oxW40  ffb400oxW40 k ,k 3.ffb348oxW40 +,ff`` +,ff~~ +, t\t\  t +, \\  3,`` 3,xx 3,xx 3,`` -,jfjfj -,ff ,ff`` ,ff~~ 2,ff`` 2,ff~~ 4,ff`` 4,ff~~k ;l  3Arrayffb348W40 Labels1to3s Lt LabelFF348   ffb348oxW40  ffb348oxW40  ffb348oxW40 k *k 2 ffb300oxW40 +,`` +,~~ +, tt  t +,   3,>>`` 3,>>xx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k l  2Arrayffb300W40 Labels1to3s Lt LabelFF300   ffb300oxW40  ffb300oxW40  ffb300oxW40 k k 0ffb248oxW40 +,ll`` +,ll~~ +, tbtb  t +, bb  3,`` 3,xx 3,xx 3,`` -,jljlj -,ll ,ll`` ,ll~~ 2,ll`` 2,ll~~ 4,ll`` 4,ll~~k l  1Arrayffb248W40 Labels1to3s Lt LabelFF248 x  ffb248oxW40  ffb248oxW40  ffb248oxW40 k l  )2ffb200oxW40 +,`` +,~~ +, tt  t +,   3,DD`` 3,DDxx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k l  0Arrayffb200W40 Labels1to3s Lt LabelFF200   ffb200oxW40  ffb200oxW40  ffb200oxW40 k 8l  5ResidualStrain LabelResidualStrain  Arrayffb400W40  Arrayffb348W40   Arrayffb300W40 R Arrayffb248W40 j Arrayffb200W40  SawMarkers2  SawMarkers2 f .,(( ., ., -,bbbl  l  7LabelSemi .,xxx .,x(x(x .,(( .,xxx ., .,XX ., .,0XX00 ., ., ., .,xxx .,hh(( .,x@x@x .,hh ., .,HH(( .,HHk 6;m  LabelMEMSChip ., .,RRR .,** .,xxx .,**(( .,x*x*x .,** ., .,bb(( .,bb .,rr(( .,"" .,JrrJJ .,"" ., .,"JJ"" .,xxx .,xJxJx .,ZZZ .,x x x .,xxx ., ., .,xBxBx .,xxx .,xxx .,RzzRR .,R(R(R .,RxxRRx .,RRR .,@ h h2@2@  .,6^^<6<6 .,,TTF,F, .,F,F,nnF .,<6<6dd< .,2@2@ZZ2 .,"(J(JP"P"( .,P"P"xxP .,Jrr(J(J .,xxx .,`xx``x .,88 .,xxx .,88(( .,x8x8x .,88 ., .,bb ., .,:bb:: ., ., .,JxrxrJJx .,xrxrx .,rr ., ., ., x2x2  x ., ( (  ., xx  x .,    .,xxx .,((((( .,((( .,h(h(h ., ., .,hhh .,@@ .,    ., h 0 0 h h .,  @ @   ., x x   x ., @ @( (  ., x @x @ x ., @ @   .,  ., x x   x ., x x( (  ., x Px P x ., x x   ., 8 ` ` 8 8 .,  .,x@x@x ., .,x@x@x .,@@ .,(( .,xx(( .,xx ., xx x .,    .,``` ., H H   ., ( (  .,    .,@(@(@ .,hh ., .,@hh@@ ., .,PPP .,xx ., .,PxxPP .,(( .,0XX00 .,l 6l 7' LabelOn .,(( .,@@ .,hhh .,@@ ., .,(( .,xxx ., .,((k m  LabelChip LabelSemi $ LabelMEMSChip  LabelOn "m /$m 2 step5and6 +, 1, 3,88 3, 3, 4,DD|| 4,|| 4,  ||m m #6step5and6_array SawMarkers  SawMarkers ^ SawMarkers  SawMarkers ^ SawMarkers  SawMarkers  6 F 5 x LabelStylus V Arrow  Arrow  step5and6 L step5and6  step5and6 m !"m 6 step4 +,   +,   +, 3, 4,||m m ! step4_array SawMarkers   SawMarkers  ^ SawMarkers   SawMarkers  SawMarkers ^ SawMarkers  4 F Arrow  step4 L step4  step4 m m $5step2and3 +,   +, +,   1,   3,    4,||m  m )step2and3_array SawMarkers  SawMarkers ^ SawMarkers  3  2 v Arrow | Arrow  step2and3 L step2and3  step2and3 k 5#m  step1 .,   +,   +, +,   3,    4,||m m step1_array SawMarkers  SawMarkers ^ SawMarkers  1 0 Arrow | step1 L step1  step1 g  g  A .,<P<PPP< .,xPxPx .,<PP<< .,g 5g C .,PP .,xPxPx .,g  g  N .,(dd(( .,x<x<x .,PddPP .,(<<(( .,m 5m 7LabelNCAP P @ A  C x N  5 $ dash <m m LabelM2M2 4 $ dash < M2 T dash < M2  .,m 9m ) LabelP1P1 dash < 1 ` dash < P1  P1  .,g  g  X .,<2<2PP< .,P<P<ddP .,(<(<<<( .,<PP<< .,2dFdFx2x2d ., ddx x d .,xxx ., .,<xPxP<<x .,2FF(2(2 ., ( ( g  g  Ox X x 0 mm LabelOxM1 2 $ dash < M1 T dash < Ox m6m 'LabelM2M1 6 $ dash < dash < M1 T M2 mm +LabelM1M1 3 $ dash < M1 , dash < M1  .,,,,k 4k #LabelStepHeight ., ., xHxH  x ., xx x .,(( .,00 ., .,00(( .,x0x0x .,00 ., .,XXX .,XxxXXx ., .,hh(( .,hh ., ., .,xxx .,xx(( .,xPxPx .,xx .,88 .,xxx .,x x x ., .,x x x .,   ., .,xxx .,XX(( .,x0x0x .,XX .,@@ ., .,ppp .,    .,xxx .,x(x(x .,(( .,xxx .,g 8m $StepHeight step5and6_array < step4_array < step2and3_array < step1_array < LabelNCAP $ LabelM2M2 $ LabelP1P1   LabelOxM1 $ LabelM2M1 $ LabelM1M1 $ LabelStepHeight  .,||| .,    .,(( F F .,(( .,   F F  -,b Fb Fbg  k ( frame .,+>,+>,+f+f+> -,,,,-,-, -,-,-,--- -,,,(( -,((--g  m /AMI7 Certification  InPlaneLength b YoungsModulus  StrainGradient bz ResidualStrain b+f LabelChip \, StepHeight b\ frame