filename of 3-D data set (optional)   =   
filename of 2-D data traces (optional) =
    
    
material =  Poly1       Poly2       stacked Poly1 and Poly2 
                 SiC-2       SiC-3    (therefore, t =  µm )
design length = µm
which fixed-fixed beam on the round robin test chip ?  First    Second     Third   
magnification = ×
orientation =  0 degree      90 degree
x-calibration factor (for the given magnification) = calx =
maximum field of view (for the given magnification) = interx = µm
one sigma uncertainty in a ruler measurement (for the given mag) = σ_xcal = µm
resolution of the interferometer in the x-direction = x_res = µm
z-calibration factor (for the given magnification) = calz =
certified value of step height standard = cert = µm
standard deviation of step height measurements (on double-sided step height standard) = σ_zcal = µm
resolution of the interferometer in the z-direction = z_res = µm
peak-to-valley roughness of a flat and leveled surface of the sample material calculated to be the average of three or more measurements, each measurement of which is taken from a different 2-D data trace = R_tave = µm
alignment ensured ?   Yes      No
data leveled ?   Yes      No
Is this fixed-fixed beam exhibiting stiction ?   Yes      No
            If it is exhibiting stiction, do not fill out the remainder of this form.

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INPUTS (uncalibrated values from Trace "a" or "e"):
              x1_max (i.e., x1_upper) = µm
              x1_min (i.e., x1_lower)  = µm           (x1_min > x1_max)
              x2_min (i.e., x2_lower)  = µm           (x2_min > x1_min)
              x2_max (i.e., x2_upper) = µm           (x2_max > x2_min)

INPUTS (uncalibrated values from Trace "b"):
              x_1F = µm    z_1F = µm   (x1_ave < x_1F * calx)
              x_2F = µm    z_2F = µm   (inflection point)
                                                                                           ( x_1F < x_2F < x_3F )
              x_3F = µm    z_3F = µm   (most deflected point)
                                                                                          ( x_1S = x_3F ; z_1S = z_3F )
              x_2S = µm    z_2S = µm   (inflection point)
              x_3S = µm    z_3S = µm   ( x_3S * calx < x2_ave )
                                                                                          ( x_1S < x_2S < x_3S )

INPUTS (uncalibrated values from Trace "c"): 
              x_1F = µm    z_1F = µm   (x1_ave < x_1F * calx)
              x_2F = µm    z_2F = µm   (inflection point)
                                                                                           ( x_1F < x_2F < x_3F )
              x_3F = µm    z_3F = µm   (most deflected point)
                                                                                            ( x_1S = x_3F ; z_1S = z_3F )
              x_2S = µm    z_2S = µm   (inflection point)
              x_3S = µm    z_3S = µm   ( x_3S  * calx < x2_ave )
                                                                                           ( x_1S < x_2S < x_3S )

INPUTS (uncalibrated values from Trace "d"): 
              x_1F = µm    z_1F = µm   (x1_ave < x_1F * calx)
              x_2F = µm    z_2F = µm   (inflection point)
                                                                                          ( x_1F < x_2F < x_3F )
              x_3F = µm    z_3F = µm   (most deflected point)
                                                                                           ( x_1S = x_3F ; z_1S = z_3F )
              x_2S = µm    z_2S = µm   (inflection point)
              x_3S = µm    z_3S = µm   ( x_3S  * calx < x2_ave )
                                                                                           ( x_1S < x_2S < x_3S )

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OUTPUTS (calibrated values):
            x1_ave =  µm            x2_ave =  µm
             L      =  µm
                         L_max = ( x2_max − x1_max ) * calx
                         L_min = ( x2_min − x1_min ) * calx
                         u_LL  =  ( L_max − L_min ) / 6 =  µm
                         u_Lxcal  = ( σ_xcal / interx ) * ( L / calx ) = µm
                         u_Lxres  = x_res* calx / 1.732 =  µm
             u_cL   =  SQRT[u_LL² + u_Lxcal² + u_Lxres²]  =  µm
             s        =                    from Trace "c"
                         s = 1       (for downward bending fixed-fixed beams)
                         s = −1     (for upward bending fixed-fixed beams)

                             A_F   =  µm      from Trace "b"
                           w_1F   =             from Trace "b"
                             A_S   =  µm      from Trace "b"
                           w_3S   =              from Trace "b"
             x_eF   =  µm            from Trace "b"
             x_eS   =  µm            from Trace "b"
            ε_r0    =  × 10^-6       from Trace "b"
            ε_r     =    × 10^-6       from Trace "b"

                             A_F   =  µm      from Trace "c"
                           w_1F   =             from Trace "c"
                             A_S   =  µm      from Trace "c"
                           w_3S   =              from Trace "c"
             x_eF   =  µm             from Trace "c"
             x_eS   =  µm             from Trace "c"
             ε_r0   =  × 10^-6        from Trace "c"
             ε_r    =    × 10^-6        from Trace "c"
                         u_samp    =    × 10^-6      from Trace "c"
                         u_W    =    × 10^-6          from two or three traces
                         u_xcal    =    × 10^-6        from Trace "c"
                         u_L    =    × 10^-6           from Trace "c"
                         u_zcal    =    × 10^-6        from Trace "c"
                         u_zres    =    × 10^-6        from Trace "c"
                         u_xres    =    × 10^-6        from Trace "c"
                         u_xresL    =    × 10^-6        from Trace "c"
             u_c    = SQRT[u_samp² + u_W² + u_xcal² + u_L² + u_zcal² + u_zres² + u_xres² + u_xresL²]
             u_c    =    × 10^-6        from two or three traces

                             A_F   =  µm      from Trace "d"
                           w_1F   =             from Trace "d"
                             A_S   =  µm      from Trace "d"
                           w_3S   =              from Trace "d"
             x_eF   =  µm             from Trace "d"
             x_eS   =  µm             from Trace "d"
            ε_r0    =  × 10^-6        from Trace "d"
            ε_r     =    × 10^-6        from Trace "d"

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Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:
    1.   Please fill out the entire form.
    2.   For the round robin test chip, the thickness value is different than what the fabricator specified.
    3.   For the round robin test chip, the design length should be 400, 450, 500, 550, 600, 650, 700, 750, or 800 mm. 
    4.   The measured value for L is more than 3u_cL from the design length.
    5.   Is the magnification appropriate given the design length ?
    6.   Magnifications at or less than 2.5× shall not be used.
    7.   Is 0.95 < calx < 1.05 but not equal to "1"?  If not, recheck your x-calibration.
    8.   The value for interx should be between 0 µm and 1500 µm.
    9.   The value for σ_xcal should be between 0 µm and 4 µm.
  10.   The value for x_res should be between 0 µm and 1.57 µm.
  11.   Is 0.95 < calz < 1.05 but not equal to "1" ?  If not, recheck your z-calibration.
  12.   The value for σ_zcal should be between 0 µm and 0.050 µm.
  13.   The value for cert should be greater than 0 µm and less than 25 µm.
  14.   The value for z_res should be greater than 0 µm and less than or equal to 0.005 µm.
  15.   The value for R_tave should be between 0 µm and 0.100 µm.
  16.   Alignment has not been ensured.
  17.   Data has not been leveled.
  18.   x1_min should be greater than x1_max.
  19.  x2_min should be greater than x1_min.
  20.   x2_max should be greater than x2_min.
  21.   The calibrated values for x1_min and x1_max are greater than 10 µm apart.
  22.   The calibrated values for x2_min and x2_max are greater than 10 µm apart.
  23.   In Traces "b," "c," and "d," the value for s is not the same.
  24.   x1_ave should be < (x_1F * calx) in all traces.
  25.   (x_3S * calx) should be < x2_ave in all traces.
  26.   In all traces, make sure ( x_1F < x_2F < x_3F ).
  27.   In all traces, make sure ( x_1S < x_2S < x_3S ).
  28.   For Trace "b," | [(x_2F*calx) − x_eF ] | = µm.  This should be < 5 µm.
                     If it is not, choose (x_2F, z_2F) such that (x_2F * calx) is closer to x_eF = µm.
  29.   For Trace "b," | [(x_2S*calx) − x_eS ] | =  µm.  This should be < 5 µm.
                     If it is not, choose (x_2S, z_2S) such that (x_2S * calx) is closer to x_eS = µm.
  30.   For Trace "c," | [(x_2F*calx) − x_eF ] | = µm.  This should be < 5 µm.
                     If it is not, choose (x_2F, z_2F) such that (x_2F * calx) is closer to x_eF = µm.
  31.   For Trace "c," | [(x_2S*calx) − x_eS ] | =  µm.  This should be < 5 µm.
                     If it is not, choose (x_2S, z_2S) such that (x_2S * calx) is closer to x_eS = µm.
  32.   For Trace "d," | [(x_2F*calx) − x_eF ] | =  µm.  This should be < 5 µm.
                     If it is not, choose (x_2F, z_2F) such that (x_2F * calx) is closer to x_eF = µm.
  33.   For Trace "d," | [(x_2S*calx) − x_eS ] | =  µm.  This should be < 5 µm.
                     If it is not, choose (x_2S, z_2S) such that (x_2S * calx) is closer to x_eS = µm.

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NIST is an agency of the U.S. Commerce Department
The Semiconductor Electronics Division is within the Electronics and Electrical Engineering Laboratory.
The MNT Project (http://www.eeel.nist.gov/812/MNT/index.html) is within the Enabling Devices and ICs Group.

Date created: 12/4/2000
Last updated: 1/11/2008