date data taken (optional) = / /
identifying words (optional)   =   
instrument used (optional)   =   
fabrication facility/process (optional)   =   
test chip name/number (optional)   =   
filename of 3-D data set (optional)   = 
filename of 2-D data traces (optional) =
     
     
 

Table 1 - Preliminary ESTIMATES			Description
1	material =	Poly1       Poly2       stacked Poly1 and Poly2     SiC-2       SiC-3     other	material
2	design length =	µm	design length
3	which cantilever?	First     Second     Third     Fourth     Fifth     Other	which cantilever on the test chip ?
4	magnification =	×	magnification
5	orientation =	0°           90°        180°      270°      Other	orientation of the cantilever on the chip
6	calx =		x-calibration factor (for the given magnification)
7	interx =	µm	maximum field of view (for the given magnification)
8	σxcal =	µm	one sigma uncertainty in a ruler measurement (for the given magnification)
9	xres =	µm	resolution of the interferometer in the x-direction
10	calz =		z-calibration factor (for the given magnification)
11	cert =	µm	certified value of double-sided physical step height used for calibration
12	σzcal =	µm	standard deviation of step height measurements (on double-sided physical step height)
13	zres =	µm	resolution of the interferometer in the z-direction
14	Rtave =	µm	peak-to-valley roughness of a flat and leveled surface of the sample material calculated to be the average of three or more measurements, each measurement of which is taken from a different 2-D data trace
15	aligned?	Yes      No	alignment ensured ?
16	leveled?	Yes      No	data leveled ?
17	stiction?	Yes      No	Is this cantilever exhibiting stiction ?   (If it is exhibiting stiction, do not fill out the remainder of this form.)

                                     

Table 2 - INPUTS (uncalibrated values from Trace "a" or "e")			Notes
18	x1max (i.e., x1upper) =	µm
19	x1min (i.e., x1lower) =	µm	(x1min > x1max)

Table 3 - INPUTS (uncalibrated values from Trace "b")			Notes
20	x1 = µm	z1 = µm	(x1ave < x1 * calx)
21	x2 = µm	z2 = µm	(x1ave < x2 * calx)
22	x3 = µm	z3 = µm	(x1ave < x3 * calx)

Table 4 - INPUTS (uncalibrated values from Trace "c")			Notes
23	x1 = µm	z1 = µm	(x1ave < x1 * calx)
24	x2 = µm	z2 = µm	(x1ave < x2 * calx)
25	x3 = µm	z3 = µm	(x1ave < x3 * calx)

Table 5 - INPUTS (uncalibrated values from Trace "d")			Notes
26	x1 = µm	z1 = µm	(x1ave < x1 * calx)
27	x2 = µm	z2 = µm	(x1ave < x2 * calx)
28	x3 = µm	z3 = µm	(x1ave < x3 * calx)

                                  


OUTPUTS (calibrated values):
           x1_ave =  µm
            s =               from Trace "c"
                    s = 1 (for downward bending cantilevers or
                              if data was taken from the bottom of an upward bending cantilever)
                    s = −1 (for upward bending cantilevers unless
                                data was taken from the bottom of an upward bending cantilever)

                      R_int =  µm    from Trace "b"
                        a   =  µm    from Trace "b"
                        b   =  µm    from Trace "b"
            s_g =  m⁻¹    from Trace "b"

                      R_int =  µm    from Trace "c"
                        a   =  µm    from Trace "c"
                        b   =  µm    from Trace "c"
             s_g =  m⁻¹    from Trace "c"                            (USE THIS VALUE)
                      u_W =  m⁻¹       from two or three traces
                      u_samp =  m⁻¹   from Trace "c"
                      u_xcal =  m⁻¹     from Trace "c"
                      u_zcal =  m⁻¹     from Trace "c"
                      u_zres =  m⁻¹     from Trace "c"
                      u_xres =  m⁻¹     from Trace "c"
             u_c =  SQRT[u_W² + u_samp² + u_xcal² + u_zcal² + u_zres² + u_xres²]
             u_c =  m⁻¹   from two or three traces

                      R_int =  µm    from Trace "d"
                        a   =  µm    from Trace "d"
                        b   =  µm    from Trace "d"
            s_g =  m⁻¹    from Trace "d"

Report the results as follows:  Since it can be assumed that the possible estimated values are either
approximately uniformly distributed or Gaussian with approximate standard deviation u_c, the strain
gradient is believed to lie in the interval s_g ± u_c with a level of confidence of approximately 68 %
assuming a Gaussian distribution. 

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Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:

1.		Please fill out the entire form.
2.		The value for the design length should be between 0 µm and 1000 µm.
3.		Is the magnification appropriate given the design length ?
4.		Magnifications at or less than 2.5× shall not be used.
5.		Is 0.95 < calx < 1.05 but not equal to "1"?  If not, recheck your x-calibration.
6.		The value for interx should be between 0 µm and 1500 µm.
7.		The value for σxcal should be between 0 µm and 4 µm.
8.		The value for xres should be between 0 µm and 2.00 µm.
9.		Is 0.95 < calz < 1.05 but not equal to "1"?  If not, recheck your z-calibration.
10.		The value for cert should be greater than 0 µm and less than 25 µm.
11.		The value for σzcal should be between 0 µm and 0.050 µm.
12.		The value for zres should be greater than 0 µm and less than or equal to 0.005 µm.
13.		The value for Rtave should be between 0 µm and 0.100 µm.
14.		Alignment has not been ensured.
15.		Data has not been leveled.
16.		x1min should be greater than x1max.
17.		The calibrated values for x1min and x1max are greater than 10 µm apart.
18.		In Trace "b," the calibrated values of x1, x2, and x3 should be > x1ave.
19.		In Trace "c," the calibrated values of x1, x2, and x3 should be > x1ave.
20.		In Trace "d," the calibrated values of x1, x2, and x3 should be > x1ave.
21.		In Traces "b," "c," and "d," the value for s is not the same.

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NIST is an agency of the U.S. Commerce Department
The Semiconductor Electronics Division is within the Electronics and Electrical Engineering Laboratory.
The MNT Project (http://www.eeel.nist.gov/812/MNT/index.html) is within the Enabling Devices and ICs Group.

Date created: 12/4/2000
Last updated: 6/2/2009