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Data Analysis Sheet SH.3

Data analysis sheet for step height measurements from two 3-D data sets taken during different data sessions.


a)                                                 b)

Figure SH.3.1.  For a CMOS step height test structure: a) a design rendition and b) a cross-section.

To obtain the following measurements, consult SEMI standard test method MS2 entitled
"Test Method for Step-Height Measurements of Thin, Reflecting Films Using an Optical Interferometer."







Preliminary INPUTS

 

  First Data Set Second Data Set

Description

1 proc =

MUMPs 
   
     

which process?
2 first      
 
    
   
      
    
    
 
    
   
      
    
which quad of test structures, if applicable?
3 0°     

   

 

 

 

   

   

 

 

 

orientation
4 × ×
5 Yes

alignment ensured?
6 Yes

data leveled?
7 µm µm
8 µm µm
9 µm µm
10 µm µm
11 µm µm
12
13

                                      

                                    


Nomenclature:
    "L" and "M" refer to the test structure number ("1," "2," "3," etc.),
    "X" and "Y" refer to the platform letter ("A," "B," "C," etc.),
    "r" refers to the reference platform,
    "W" and "E" directionally indicate which reference platform, and
    the data traces are "a," "b," and "c".

Uncalibrated REFERENCE PLATFORM INPUTS (in mm)
First Data Set Second Data Set
1a 4a 1b 4b
2a 5a 2b 5b
3a 6a 3b 6b
 
Calibrated REFERENCE PLATFORM CALCULATIONS (in mm)
First Data Set Second Data Set
7a 8a 7b 8b
Note 1:  platLr = AVE(platLrWa, platLrWb, platLrWc, platLrEa, platLrEb, platLrEc)*calz
Note 2
:  splatLr = STDEV(platLrWa, platLrWb, platLrWc, platLrEa, platLrEb, platLrEc)*calz
Note 3:  The calculations for the second data set are similar to the calculations for the first data set
given in Notes 1 and 2.
Uncalibrated PLATFORM INPUTS (in mm)
First Data Set Second Data Set
9a 9b
10a 10b
11a 11b
 
Calibrated PLATFORM CALCULATIONS (in mm)
First Data Set Second Data Set
12a 12b
13a 13b
14a 14b
15a 15b
16a 16b
17a 17b
18a 18b
19a 19b
Note 4:  platLX = calz*AVE(platLXa, platLXb, platLXc) - platLr
Note 5
:  splatLX = calz*STDEV(platLXa, platLXb, platLXc)
Note 6
:  uWplatLX = SQRT(splatLX2+splatLr2)
Note 7
:  ucertLX = |scert*platLX / cert|
Note 8:  urepeatLX = |zrepeat*platLX / (2*1.732*z6)|
Note 9:  udriftLX = |zdrift*calz*platLX / (2*1.732*cert)|
Note 10:  ulinearLX = |zperc*platLX / (1.732*100)|
Note 11:  uplatLX = SQRT(uWplatLX2+ucertLX2+urepeatLX2+udriftLX2+ulinearLX2)
Note 12
:  The calculations for the second data set are similar to the calculations for the first data set
given in Notes 4 through 11.
Calibrated OUTPUTS (in mm)
 
20
Note 13:  stepLXMY = platMY-platLX
Note 14:  uc = SQRT(uplatLX2+uplatMY2)

Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:

1. he Preliminary Inputs Table.
2.
3a.
3b.
4a.
4b.
5.
6.
7.
8.
9.
10.
11.
12.  
13.
14.  
15.  
16.  
17.  
18.  
19.
20.
21.
22.
23.

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Date created: 3/4/2006
Last updated:
1/11/2008