date data taken (optional)  = 
identifying words (optional)  = 
filename of 3-D data set from test structure #1 (optional) =
filename of 3-D data set from test structure #2 (optional) =
filename of 3-D data set from test structure #3 before etch (optional) =
filename of 3-D data set from test structure #3 after etch (optional) =  

Preliminary INPUTS
Data Set Prelims			Description
1	mag =	×	magnification
2	orient =	0º              90º	orientation
3	align =	Yes           No	alignment ensured ?
4	level =	Yes           No	data leveled ?
5	cert =	µm	certified value of step height standard
6	σcert =	µm	certified one sigma uncertainty of certified value of step height standard
7	zrepeat =	µm	maximum uncalibrated range of the six calibration measurements taken before the data session or after the data session (whichever is larger)
8	z6 =	µm	the uncalibrated average of the six calibration measurements from which zrepeat is found
9	zdrift =	µm	uncalibrated drift in the calibrated data (i.e., the absolute value of the mean value of the six calibration measurements taken before the data session minus the mean value after the data session)
10	calz =		the z-calibration factor = the certified value of the step height standard divided by the average of the twelve calibration measurements
11	zperc =	%	percent quoted by interferometer manufacturer for the maximum deviation from linearity of the data scan over the total scan range
12	crystal =	%	the estimated one sigma uncertainty for the crystal lattice percentages
13	sigma =		= 1 for a one sigma uncertainty analysis of the thicknesses = 2 for a two sigma uncertainty analysis of the thicknesses (recommended) = 10 to determine if the 3uc error bars touch or overlap

                                      

                                    

 

TABLE 1a - Calibrated Step Height Measurements (in Micrometers)^*,**

#	Step	Height	uWstep	ucert	urepeat	udrift	ulinear	ucW
1	step1AB
2	step1CD
3	step1EF		<