filename of 3-D data set (optional)   = 
filename of 2-D data trace (optional) =
material =  Poly1       Poly2       stacked Poly1 and Poly2 
                 SiC-2       SiC-3   
design length = µm
magnification = ×
orientation =  0 degree      90 degree
x-calibration factor (for the given magnification) = calx =
interferometer's maximum field of view (for the given magnification) = interx = µm
one sigma uncertainty in a ruler measurement (for the given mag) = σ_xcal = µm
resolution of the interferometer in the x-direction = x_res = µm
z-calibration factor (for the given magnification) = calz =
alignment ensured ?   Yes      No
data leveled ?   Yes      No

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INPUTS (uncalibrated values):
              x1_max (i.e., x1_upper) = µm
              x1_min (i.e., x1_lower) = µm       (x1_min > x1_max)
              x5_min (i.e., x5_upper) = µm       (x5_min > x1_min)
              x5_max (i.e., x5_lower) = µm       (x5_max > x5_min)

             pixel-to-pixel spacing (for the given magnification) = sep = µm
             Use 'lower' or 'upper' values for calculation ?   Lower      Upper

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OUTPUTS (calibrated values):
            L_min =  ( x5_min − x1_min ) * calx =  µm
            L_max = ( x5_max − x1_max ) * calx =  µm
            L =  (L_min + L_max ) / 2 = µm
                     u_L = (L_max − L_min ) / 6 = µm
                     u_xcal = (σ_xcal / interx ) * ( L / calx ) = µm
                     u_xres = x_res * calx / 1.732 = µm
            u_c = SQRT [ u_L² + u_xcal² + u_xres² ] = µm

            L_low (using lower values) = ( x5_lower − x1_lower ) * calx = µm
                     u_L-low = (2 * sep * calx) / 3 = µm
                     u_xcal-low = (σ_xcal / interx ) * ( L_low / calx ) = µm
            u_clow = SQRT [ u_L-low² + u_xcal-low² + u_xres²] = µm

            L_up (using upper values) = ( x5_upper − x1_upper ) * calx = µm
                     u_L-up = (2 * sep * calx) / 3 = µm
                     u_xcal-up = (σ_xcal / interx ) * ( L_up / calx ) = µm
            u_cup = SQRT [ u_L-up² + u_xcal-up² + u_xres²] = µm

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Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:
    1.   Please fill out the entire form.
    2.   For the round robin test chip, the design length should be 60, 115, 235, 535, or 1035 mm.
    3.   The measured value for L is more than 3u_c from the design length.
    4.   Is the magnification appropriate given the design length ?
    5.   Magnifications at or less than 2.5× shall not be used.
    6.   Is 0.95 < calx < 1.05 but not equal to "1" ?  If not, recheck your x-calibration.
    7.   The value for interx should be between 0 µm and 1500 µm.
    8.   The value for σ_xcal should be between 0 µm and 4 µm.
    9.   The value for x_res should be between 0 µm and 1.57 µm.
  10.   Is 0.95 < calz < 1.05 but not equal to "1" ?  If not, recheck your z-calibration.
  11.   Alignment has not been ensured.
  12.   Data has not been leveled.
  13.   x1_min should be greater than x1_max.
  14.   x5_min should be greater than x1_min.
  15.   x5_max should be greater than x5_min.
  16.   The calibrated values for x1_min and x1_max are greater than 10 µm apart.
  17.   The calibrated values for x5_min and x5_max are greater than 10 µm apart.
  18.   sep should be between 0 µm and 1.57 µm.

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Return to Main MEMS Calculator Page.

 

NIST is an agency of the U.S. Commerce Department's
The Semiconductor Electronics Division is within the Electronics and Electrical Engineering Laboratory.
The MNT Project (http://www.eeel.nist.gov/812/MNT/index.html) is within the Enabling Devices and ICs Group.

Date created: 12/4/2000
Last updated: 1/11/2008