filename of 3-D data set (optional)   = 
filename of 2-D data traces (optional) =
                                                              
material =  Poly1       Poly2       stacked Poly1 and Poly2 
                 SiC-2       SiC-3   
designed displacement = µm
magnification = ×
orientation =  0 degree      90 degree
x-calibration factor (for the given magnification) = calx =
interferometer's maximum field of view (for the given magnification) = interx = µm
one sigma uncertainty in a ruler measurement (for the given mag) = σ_xcal = µm
resolution of the interferometer in the x-direction = x_res = µm
z-calibration factor (for the given magnification) = calz =
alignment ensured ?   Yes      No
data leveled ?   Yes      No

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INPUTS (uncalibrated values):
              x1_max (i.e., x1_lower) = µm
              x1_min (i.e., x1_upper) = µm       (x1_min > x1_max)
              x2_min (i.e., x2_lower) = µm        (x2_min > x1_min)
              x2_max (i.e., x2_upper) = µm       (x2_max > x2_min)

             pixel-to-pixel spacing (for the given magnification) = sep = µm
             Use 'lower' or 'upper' values for calculation ?   Lower      Upper

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OUTPUTS (calibrated values):
            D_1-min =  ( x2_min − x1_min ) * calx =  µm
            D_1-max = ( x2_max − x1_max ) * calx =  µm
            D₁ =  (D_1-min + D_1-max ) / 2 = µm
                     u_D = (D_1-max − D_1-min ) / 6 = µm
                     u_xcal = (σ_xcal / interx) * ( D₁ / calx ) = µm
                     u_xres = x_res *  calx / 1.732 = µm
            u_c = SQRT [ u_D² + u_xcal² + u_xres²] = µm

            D_1low (using lower values) = ( x2_lower − x1_lower ) * calx = µm
                     u_D-low = (2 * sep * calx) / 3 = µm
                     u_xcal-low = (σ_xcal / interx) * ( D_1low / calx ) = µm
            u_clow = SQRT [ u_D-low² + u_xcal-low² + u_xres²] = µm

            D_1up (using upper values) = ( x2_upper − x1_upper ) * calx = µm
                     u_D-up = (2 * sep * calx) / 3 = µm
                     u_xcal-up = (σ_xcal / interx) * ( D_1up / calx ) = µm
            u_cup = SQRT [ u_D-up² + u_xcal-up² + u_xres²] = µm

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Modify the input data, given the information supplied in any flagged statement below, if applicable, then recalculate:
    1.   Please fill out the entire form.
    2.   For the round robin test chip, the designed displacement should be 0.0 µm.
    3.   The measured value for D₁ is 10 µm greater than the designed displacement.
    4.   Is the magnification appropriate given the value for D₁ ?
    5.   Magnifications at or less than 2.5× shall not be used.
    6.   Is 0.95 < calx < 1.05 but not equal to "1" ?  If not, recheck your x-calibration.
    7.   The value for interx should be between 0 µm and 1500 µm.
    8.   The value for σ_xcal should be between 0 µm and 4 µm.
    9.   The value for x_res should be between 0 µm and 1.57 µm.
  10.   Is 0.95 < calz < 1.05 but not equal to "1" ?  If not, recheck your z-calibration.
  11.   Alignment has not been ensured.
  12.   Data has not been leveled.
  13.   x1_min should be greater than x1_max.
  14.   x2_min should be greater than x1_min.
  15.   x2_max should be greater than x2_min.
  16.   The calibrated values for x1_min and x1_max are greater than 10 µm apart.
  17.   The calibrated values for x2_min and x2_max are greater than 10 µm apart.
  18.   sep should be between 0 µm and 1.57 µm.

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NIST is an agency of the U.S. Commerce Department
The Semiconductor Electronics Division is within the Electronics and Electrical Engineering Laboratory.
The MNT Project (http://www.eeel.nist.gov/812/MNT/index.html) is within the Enabling Devices and ICs Group.

Date created: 12/4/2000
Last updated: 1/11/2008