k  2k  25n1CMOS_LEDIT_12.22.0@;k_j k #k 'equalsign .,PP .,(P(P<<(g  g  0 .,xPxPx .,<PP<< ., .,PPg )0g *4 .,<P<PPP< .,<PP<< .,<<<k k 0W40 equalsign ( 0  4 , ., .,PP .,xxx .,<PP<< .,<<<g : g :8 .,<PP<< ., .,xPxPx .,<P<PPP< .,PPg  g +2 .,PP .,<<P<P<<< .,xPxPx .,<P<PPP< .,PPk $k 4W28 8  2 , equalsign ( ., .,PP .,xxx .,<PP<< .,<<<k (k ,LabelLinewidth .,Fxx(F(F .,FxxFF ., .,xxx ., .,00 .,hhh ., ., .,`(((`(` .,`((`` .,PxxPP .,P(P(P .,PPP .,88(( .,p(p(p .,88 ., .,ppp ., .,xxx .,HH(( .,x x x .,HH .,(( .,00 .,XXX .,00 ., .,@@ .,(( ., .,(( .,((k -4k  LinewidthCVOS W40  W28 ^ LabelLinewidth  +,EEE +,EwEwwwE +,   +,}ww } } +,EEwwE +,EwwEE +,  ww +,E}w}wwEwE} +,   +, E E   E +,     +,E E E +,ww +,___ +,}_w_w}}_ +, +,E_w_w'E'E_ +,3 3 3 +,EwwEE +,_ _ YY_ +,      +,_ _ _ +,   +, , q q R R q ,EwEwwwE ,   ,ww   ,EEwwE ,EwwEE ,  ww ,EwwwEwE ,  RR , R R  ,}}RR , }} ,  RR , E E   E ,    ,     ,E E E ,MM ,     , ,e--ee , ,MMRR ,   R R  ,RR ,e--ReRe ,RR ,      ,ww ,___ ,_w_w_ , ,E_w_w'E'E_ ,3 3 3 ,EwwEE ,_ _ _ ,      ,}} ,   ,Y Y Y ,      ,      ,_ _ _ ,   ,MM ,      , ,e--ee , ,_M_M_ , _ _   _ ,___ ,e_-_-ee_ ,___ 2, q q R R q 2,EwEwwwE 2,   2,ww   2,EEwwE 2,EwwEE 2,  ww 2,EwwwEwE 2,  RR 2, R R  2,}}RR 2, }} 2,  RR 2, E E   E 2,    2,     2,E E E 2,MM 2,     2, 2,e--ee 2, 2,MMRR 2,   R R  2,RR 2,e--ReRe 2,RR 2,      2,ww 2,___ 2,_w_w_ 2, 2,E_w_w'E'E_ 2,3 3 3 2,EwwEE 2,_ _ _ 2,      2,}} 2,   2,Y Y Y 2,      2,      2,_ _ _ 2,   2,MM 2,      2, 2,e--ee 2, 2,_M_M_ 2, _ _   _ 2,___ 2,e_-_-ee_ 2,___ 4, q q R R q 4,EwEwwwE 4,   4,ww   4,EEwwE 4,EwwEE 4,  ww 4,EwwwEwE 4,  RR 4, R R  4,}}RR 4, }} 4,  RR 4, E E   E 4,    4,     4,E E E 4,MM 4,     4, 4,e--ee 4, 4,MMRR 4,   R R  4,RR 4,e--ReRe 4,RR 4,      4,ww 4,___ 4,_w_w_ 4, 4,E_w_w'E'E_ 4,3 3 3 4,EwwEE 4,_ _ _ 4,      4,}} 4,   4,Y Y Y 4,      4,      4,_ _ _ 4,   4,MM 4,      4, 4,e--ee 4, 4,_M_M_ 4, _ _   _ 4,___ 4,e_-_-ee_ 4,___k ,4k *LabelTensile .,HH(( .,p  (p(p .,`(`(` .,((((( .,p88(p(p .,(( .,HH(( .,(( .,    ., 8  8 8 ., .,xxx .,x x x .,HH .,   .,pxxppx .,px x ppx .,p  pp .,00 ., .,``` .,(PP(( .,(xPxP((x .,(xx((x .,((( ., .,p88pp ., .,xxx .,xhxhx ., ., HH   .,xxx .,xHxHx .,HH .,00 .,XXX .,00 ., .,PxxPP .,k6k -M2tensile 8 4o]L;+l]M<+}ocX+N;FL@]<o989<@FNXc o}%0:BHLOPOL+H<BM:]0l%y 43/)! {pg_YUTU Y_!g)p/{34 +,-- 3UVZ_gq| !).232.|)q!g_ ZVU+3<DMU\dy$,3;DLU]x rk%d*\0U5M9D=<A3D+G"JLNOOLJA50*}%vpic ^XSG><99:<o>fA]DUGLKDO;S3X,^$civ } 3,ttt 3,^^^ 3, 3,|]]|| 3,`` 3,#*#*WW# 3,!.!.WW! 3,EE 3,9/9/9 3,777 3,999 3,,,~~, 3,99~~9 3,--mm- 3,''mm' 3, 3,   3,^^mm^ 3,^ ^ mm^ 3,y y y 3, 3,+++ 3,XX 3,YY 3,-Y-Y- 3, ,-- 2,-- 4,--k &8k *"TensileTest LabelTensile  M2tensile  M2tensile  M2tensile k k LabelCertificationPlus ., .,8x`x`88x .,8(8(8 .,8xx88x .,888 .,    ., p  p p ., p( p( p .,    ., H H( (  ., x x x ., Xx x  X Xx .,     .,    .,    ., `  ` ` ., ` ( `( ` ., `  ` ` ., x ( x( x ., (  ( ( .,    ., x  x x ., ( P P ( ( ., .,HH ., .,p 8 8(p(p .,p 8 8pp .,xXxXx .,0XX00 ., .,XX .,PxxPP .,(( ., .,8``88 .,8x`x`88x .,8xx88x .,888 ., .,X  XX ., .,(( ., ., & &22  .,<< .,FF .,FFnnF .,<<dd< .,22ZZ2 .,((PP( .,PPxxP .,00(( .,x0x0x .,x0x0x .,00 ., .,(( .,(( ., ., .,xxx .,hh(( .,x@x@x .,hh ., .,H(H(H .,HHHg g 5SawMarkers .,ddddd .,dd(( 1,dd 1,dd((g  g  Arrow .,$$ .,"" .,   ., ., ., .,    .,    .,  .,   ., ., .,  .,ddg  g  P .,<<P<P<<< .,xPxPx .,<P<PPP< .,g  g 0P2 2 d P g  g 71 .,g  g  P1 1 x P k$k"3TS4 4 P` 4 H` 4 PD 4 HD Arrow &D Arrow D P2 ` P1 6` .,00 8, +,00 3,00 4,  g .g #3 .,<PP<< .,xPxPx .,<P<PPP< .,PPg k  2TS3 3 4` 3 P` 3 4D 3 PD Arrow D Arrow &D Arrow D +,00 1, 3,00 3,0000 3,00000 4,""  " 4,   4,  g k)0TS2 2 L` 2 P` 2 LD 2 PD Arrow D Arrow &D Arrow D Arrow D P2 ` P1 ` ., 8,000 +,00 1,444 1,HH 1,,, 3,00 4,  g  g  M .,xdxdx .,PddPP .,(<<(( .,g  g  M2 2 x M g  g  M1 M  1 g k6TS1 1 ` 1 xD 1 D Arrow D Arrow D Arrow D Arrow D M2 ~` M1 p` P2 b` P1 T` .,.. 8,2FF22 +,00 +, +, +, 1,J``JJ 3,00 4,  k  k 5LabelThickness .,ddd .,ZZZ ., ., ., .,$$ ., ., ., ., ., ., ., .,  22  .,<< .,FF .,FFnnF .,<<dd< .,22ZZ2 .,((PP( .,PPxxP .,$$(( .,ppp .,DllDD .,xxx .,ll(( .,xlxlx .,ll .,||| .,x,x,x .,(( .,xxx ., .,(( .,LLL ., ., .,LttLL .,00 .,(( ., .,xxx .,hhh ., .,PxxPP ., ., .,HH(( .,HH .,<dd<< .,<xdxd<<x .,<(<(< .,<xx<<x .,<<<k *k 8(Thickness SawMarkers d TS4  SawMarkers d SawMarkers 8 SawMarkers 8 TS3  SawMarkers t  SawMarkers   TS2 t SawMarkers p  SawMarkers   TS1  | LabelThickness  tk k +Certification LinewidthCVOS p TensileTest  p LabelCertificationPlus   Thickness R .,bbb .,zzz -,(( -,((h2h100 1  0  0 (k 2"k LabelL1000 0  100 k 1%k 4ArrayL1000 LabelL1000  3,V V V 3,22(( 3,  < <( (  3,2< < 22< 3,0 0 vv0 3,22 3,  < <   3,2  \2\2 3, PP  3,22 3, d <d < d 3,2 6262g  g  5 .,<PPP<P< .,<<< .,xPxPx .,<P<PPP< .,PPg  g  500 0  0 d 5 k +5k LabelL500 500 k *%k ArrayL500 LabelL500  3, 3,B2B2ZZB 3,ZZZZ 3,2nn22n 3,bbb 3,2244 3,ZZ44 3,2HH22H 3,<<< 3,22 3,ZZ 3,2""h2h2"h%h 200 2  0  0 dk 3k LabelL200 200 k,k ArrayL200 LabelL200  3,`&`&` 3,2222 3,&ll2&2& 3,2F&F&22F 3,:&:&: 3,22   3,&ll & & 3,2 & &f2f2  3,&&ZZ 3,22 3,&nlnl&&n 3,2&&@2@2k #k  LabelL80 0 d 8 k k  ArrayL80 LabelL80 < 3,``` 3,2222 3,@@22 3,2FF22F 3,::: 3,22   3,@@   3,2  f2f2  3,ZZ 3,22 3,n@n@n 3,2@2@2k "k 9Labels1to3 3  2 0 1 `k "!k ( LabelL24 4 d 2 k !(k # ArrayL24 Labels1to3 tZ LabelL24  3,`n`n` 3,2222 3,n2n2n 3,2FnFn22F 3,:n:n: 3,22   3,n n n 3,2 n nf2f2  3,nnZZ 3,22 3,nnnnnn 3,2nn@2@2k ! k 3ArrayLength ArrayL1000  < ArrayL500 d  ArrayL200 2 ArrayL80 2 ArrayL24 2k 8k $:LabelInPlaneLength W28  HF ., ( (  ., ., xHxH  x ., xx x .,    .,(( ., ( (  ., 0 X X 0 0 .,    ., x Xx X x .,    ., Px x P Px ., ( (   ., x x x .,HppHH .,HxpxpHHx .,H(H(H .,HxxHHx .,HHH ., .,  (( .,P(P(P .,xx ., .,PxxPP .,(( ., .,8``88 .,8xx88x .,888 ., xHxH  x ., .,xHxHx .,HH .,  @ @   .,    ., ` ( `( ` .,     .,    ., `  ` ` .,  8 8   .,PxxPP .,(( ., .,xxx .,@(@(@ .,hh ., .,@hh@@ ., .,ppp .,p(p(p ., .,xxx .,(( .,xhxhx .,k 7k InPlaneLength ArrayLength  LabelInPlaneLength v .,(( ., -,(( -,bbbk -k 30Labels1to5 5  4  3 B 2 ^ 1 zh #k 3 can300ox +,::`` +,:: +,::`` +, tltl  t +, ll  +,NllNN 3,z`z`z 3, 3,`` -,jvjvj -,vv -,DvvDD ,::`` ,:: ,::`` 2,::`` 2,:: 2,::`` 4,::`` 4,:: 4,::``hh"300 3  0  0 dg /g 18dash .,<<h k  Label300 3  300  dash d<h $ k 0Arraycan300 Labels1to5 L, can300ox  can300ox  can300ox  can300ox  Label300  can300ox .g 01k #SawMarkers2 1, 1,TLLTT 1, >>   1, .   . . 1,pp 1,k '(k  ffb348ox +,ff`` +,ff +, t\t\  t +, \\  3,`` 3, 3, 3,`` -,jfjfj -,ff ,ff`` ,ff 2,ff`` 2,ff 4,ff`` 4,ffh ;%h 48 8 d 4 k 6!k 7 348 3  48 dg  g  F .,<<<<PP< .,xPxPx .,g g FF F d F k (7k LabelFF348 4 L 348  dash < FF  dash <k 'k 9!Arrayffb348 Labels1to5 L ffb348ox x ffb348ox  ffb348ox  ffb348ox  LabelFF348  ffb348ox k !k $ ffb248ox +,ll`` +,ll +, tbtb  t +, bb  3,`` 3, 3, 3,`` -,jljlj -,ll ,ll`` ,ll 2,ll`` 2,ll 4,ll`` 4,llk %k .248 48 d 2 k k 7LabelFF248 2 L 248  dash < dash < FF k  k 6Arrayffb248 Labels1to5 L ffb248ox x ffb248ox  ffb248ox  ffb248ox  LabelFF248 d ffb248ox h 8(k  ffb400ox +,`` +, +, tt  t +,   3,88`` 3,88 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h h 4400 4  0  0 dh 5 k .LabelFF400 5  400  dash |< FF  dash d<h 4k :Arrayffb400 Labels1to5 L, ffb400ox  ffb400ox  ffb400ox  ffb400ox  ffb400ox . LabelFF400 h*"k  ffb300ox +,`` +, +, tt  t +,   3,>>`` 3,>> 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h(k )LabelFF300 3  300  dash |< FF  dash d<h(k 8Arrayffb300 Labels1to5 L, ffb300ox  ffb300ox  ffb300ox  ffb300ox  ffb300ox . LabelFF300 h #k  ffb200ox +,`` +, +, tt  t +,   3,DD`` 3,DD 3, 3,`` -,jjj -, ,`` , 2,`` 2, 4,`` 4,h 1k  LabelFF200 1  200  dash (< dash @< FF xh k 3Arrayffb200 Labels1to5 VX ffb200ox  ffb200ox  ffb200ox  ffb200ox < ffb200ox Z LabelFF200  k 4k 2 can348ox +,f`f`f +, +,`` +, tt  t +,   +, 3,`` 3, 3,`` -,jjj -, -, ,f`f`f , ,`` 2,f`f`f 2, 2,`` 4,f`f`f 4, 4,``k 53k 0 Label348 4  348  dash d<k 3$k Arraycan348 Labels1to5 L can348ox x can348ox  can348ox  can348ox  Label348  can348ox k !k can248ox +,l`l`l +, +,`` +, tt  t +,   +, 3,  `` 3, 3,`` -,jjj -, -, ,l`l`l , ,`` 2,l`l`l 2, 2,`` 4,l`l`l 4, 4,``k $!k 4 Label248 2 L 248  dash <k k Arraycan248 Labels1to5 L can248ox x can248ox  can248ox  can248ox  Label248 , can248ox h k 0 can400ox +,44`` +,44 +,44`` +, tftf  t +, ff  +,HffHH 3,t`t`t 3, 3,`` -,jpjpj -,pp -,>pp>> ,44`` ,44 ,44`` 2,44`` 2,44 2,44`` 4,44`` 4,44 4,44``h  k 8 Label400 5  400  dash d<h k 5Arraycan400 Labels1to5 L, can400ox  can400ox  can400ox  can400ox  Label400 " can400ox .h &k : can200ox +,@@`` +,@@ +,@@`` +, trtr  t +, rr  +,TrrTT 3,`` 3, 3,`` -,j|j|j -,|| -,J||JJ ,@@`` ,@@ ,@@`` 2,@@`` 2,@@ 2,@@`` 4,@@`` 4,@@ 4,@@``h k 2 Label200 1 < 200  dash d<h 'k ;Arraycan200 Labels1to5 L, can200ox  can200ox  can200ox  can200ox  Label200 F can200ox .k k 2LabelYoungsModulus W28  lF .,(( ., .,xxx .,ddd ., ., ., ., ., ., ., ., ., .,ZZZ ., T | | T T ., x x   x ., | |( (  ., x |x | x ., | |   .,    .,  < <   .,  ( (  ., L t t L L ., L ( L( L ., $ $ ., ., $ $(( .,(( ., .,4\\44 ., .,\\(( .,\\ .,lll ., .,(( ., .,xLxLx .,$LL$$ ., .,LL .,LL(( ., ( (  .,44 .,\\\ ., 44   ., .,lll ., .,(( ., .,,TT,, .,,(,(, .,,,, ., .,txxttx .,t(t(t .,txxttx .,ttt .,FnnFF .,<dd<< .,2ZZ22 ., 22   .,<< .,FF .,(PP(( .,(( .,PxxPP .,TTT .,|| ., .,T||TT .,,, .,nnn .,k -k %YoungsModulus Arraycan300 \J SawMarkers2 4 SawMarkers2   SawMarkers2  Arrayffb348  6 Arrayffb248 t6 Arrayffb400  Arrayffb300 \ Arrayffb200  Arraycan348   Arraycan248 t Arraycan400 J Arraycan200 J LabelYoungsModulus @ .,bbb .,  ., -,((k k Labels1to5s 5  4  3  2  1 k 3k ;6can400oxW40 +,44`` +,44~~ +,44`` +, tftf  t +, ff  +,HfftHtH 3,t`t`t 3,xx 3,`` -,jpjpj -,pp -,>pp>> ,44`` ,44~~ ,44`` 2,44`` 2,44~~ 2,44`` 4,44`` 4,44~~ 4,44``k 3k &Arraycan400W40 Labels1to5s Ln Label400 J  can400oxW40  can400oxW40  can400oxW40  can400oxW40  can400oxW40 k 1;k ::can348oxW40 +,f`f`f +,~~ +,`` +, tt  t +,   +,tt 3,`` 3,xx 3,`` -,jjj -, -, ,f`f`f ,~~ ,`` 2,f`f`f 2,~~ 2,`` 4,f`f`f 4,~~ 4,``k 1(k &Arraycan348W40 Labels1to5s Ln Label348   can348oxW40  can348oxW40  can348oxW40  can348oxW40  can348oxW40 k 0k 9'can300oxW40 +,::`` +,::~~ +,::`` +, tltl  t +, ll  +,NlltNtN 3,z`z`z 3,xx 3,`` -,jvjvj -,vv -,DvvDD ,::`` ,::~~ ,::`` 2,::`` 2,::~~ 2,::`` 4,::`` 4,::~~ 4,::``k /;k %4Arraycan300W40 Labels1to5s Ln Label300   can300oxW40  can300oxW40  can300oxW40  can300oxW40  can300oxW40 k .0k 8can248W40 +,l`l`l +,~~ +,`` +, tt  t +,   +,tt 3,  `` 3,xx 3,`` -,jjj -, -, ,l`l`l ,~~ ,`` 2,l`l`l 2,~~ 2,`` 4,l`l`l 4,~~ 4,``k .k %Arraycan248W40 Labels1to5s Ln Label248 @  can248W40  can248W40  can248W40  can248W40  can248W40 k ,%k 7can200oxW40 +,@@`` +,@@~~ +,@@`` +, trtr  t +, rr  +,TrrtTtT 3,`` 3,xx 3,`` -,j|j|j -,|| -,J||JJ ,@@`` ,@@~~ ,@@`` 2,@@`` 2,@@~~ 2,@@`` 4,@@`` 4,@@~~ 4,@@``k +6k ",Arraycan200W40 Labels1to5s Ln Label200 (  can200oxW40  can200oxW40  can200oxW40  can200oxW40  can200oxW40 k 4k 2LabelStrainGradient W40  pF ., ( (  ., .,HxxHHx .,    .,(( .,  0 0   .,    .,  ( (  ., @ @   ., h  h h .,  @ @   .,    ., .,H(H(H .,HHH .,   ., .,x x x .,   .,@@ ., .,xxx .,x(x(x .,(( .,xxx ., .,>pp>> .,>pp(>(> .,   ., .,x x x .,   .,& N N2&2&  .,DD<< .,::FF .,FFnnF .,<<dd< .,2&2&ZZ2 .,(0(0PP( .,PPxxP .,0XX(0(0 .,0xXxX00x .,xXxXx .,XX ., ., .,HppHH .,H(H(H .,HHH .,(( .,888 ., ., .,8``88 .,hhh ., .,(( .,@xx@@x ., ., ( (  ., x (x (  x ., ( (  ., x xx x x .,    .,& N N2&2&  .,DD<< .,::FF .,FFnnF .,<<dd< .,2&2&ZZ2 .,(0(0PP( .,PPxxP .,0XX(0(0 .,0xXxX00x .,xXxXx .,XX ., ., `  ` ` .,  ( (  .,    k 1k .+StrainGradient Arraycan400W40  Arraycan348W40  Arraycan300W40  n Arraycan248W40  Arraycan200W40  LabelStrainGradient  n SawMarkers2  SawMarkers2  < .,LDLD  L .,      .,LLttL -,~LL ~ ~Lk ,2k LabelResidualStrain W40  F .,xxx ., HH  ., ( (  ., xx x .,    .,(( .,    ., x @ @( x( x ., x @ @ x x ., ( P P ( ( .,    ., x Px P x ., P P   .,HppHH ., ., .,0xXxX00x .,0(0(0 .,0xx00x .,000 .,>pp>> .,>pp(>(> .,PxxPP ., .,xxxxx .,xx ., V ~ ~2 V2 V  ., L t t< L< L ., B j jF BF B ., F BF Bn n F ., $< L< Ld $d $< ., .2 V2 VZ .Z .2 ., 8( `( `P 8P 8( ., P 8P 8x x P ., ` ( `( ` ., `x x  ` `x .,x x x .,  .,   ., .,HppHH .,H(H(H .,HHH ., 0 0( (  ., h  h h .,  0 0   .,    ., h  h h ., .,88 .,(( ., .,@@(( .,00 .,xxx .,00(( .,x0x0x .,00 ., .,xxx .,hh(( .,x@x@x .,hh .,n 2n2n  .,d<d<d .,ZFZFZ .,2FZFZn2n2F .,<<d<dd<d<< .,F2n2nZFZF2 .,P(x(xPPPP( .,(PPPPx(x(P .,x(x(x .,xxxxxx .,xxx ., .,(( ., .,X  (X(X .,X  XXk 3k 5 ffb400oxW40 +,`` +,~~ +, tt  t +,   3,88`` 3,88xx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k k *Arrayffb400W40 Labels1to5s Ln LabelFF400   ffb400oxW40  ffb400oxW40  ffb400oxW40  ffb400oxW40  ffb400oxW40 k ,k 3.ffb348oxW40 +,ff`` +,ff~~ +, t\t\  t +, \\  3,`` 3,xx 3,xx 3,`` -,jfjfj -,ff ,ff`` ,ff~~ 2,ff`` 2,ff~~ 4,ff`` 4,ff~~k ;k Arrayffb348W40 Labels1to5s Ln LabelFF348   ffb348oxW40  ffb348oxW40  ffb348oxW40  ffb348oxW40  ffb348oxW40 k *k 2 ffb300oxW40 +,`` +,~~ +, tt  t +,   3,>>`` 3,>>xx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k k Arrayffb300W40 Labels1to5s Ln LabelFF300   ffb300oxW40  ffb300oxW40  ffb300oxW40  ffb300oxW40  ffb300oxW40 k k 0ffb248oxW40 +,ll`` +,ll~~ +, tbtb  t +, bb  3,`` 3,xx 3,xx 3,`` -,jljlj -,ll ,ll`` ,ll~~ 2,ll`` 2,ll~~ 4,ll`` 4,ll~~k k *Arrayffb248W40 Labels1to5s Ln LabelFF248 x  ffb248oxW40  ffb248oxW40  ffb248oxW40  ffb248oxW40  ffb248oxW40 k k --ffb200oxW40 +,`` +,~~ +, tt  t +,   3,DD`` 3,DDxx 3,xx 3,`` -,jjj -, ,`` ,~~ 2,`` 2,~~ 4,`` 4,~~k k 7Arrayffb200W40 Labels1to5s Ln LabelFF200   ffb200oxW40  ffb200oxW40  ffb200oxW40  ffb200oxW40  ffb200oxW40 k 8k .ResidualStrain LabelResidualStrain pZ Arrayffb400W40  ^ Arrayffb348W40 | Arrayffb300W40  Arrayffb248W40 * Arrayffb200W40  SawMarkers2 t SawMarkers2 ( .,888 .,8J8J``8 .,JJ -,"8J8J""8h "*k :LabelAMI5 .,xxx .,x x x .,  (( .,   .,   ., .,XX(( .,XX ., .,hhh .,@@ ., .,xxx .,xxx ., .,((k +k 57Label5n1SRM .,  22  .,|<|<| .,rFrFr .,JFrFrnJnJF .,T<|<|dTdT< .,^22Z^Z^2 .,h((PhPh( .,@PhPhx@x@P .,(( .,pxxppx .,xhxhx .,xxx .,x(x(x .,(( .,xxx ., .,8``88 .,000 .,XX ., .,0XX00 ., .,xxx .,xxx ., .,@@ ., .,PxxxxPPx .,P(P(P .,PxxPPx .,PPP ., .,XX(( .,XX .,HH(( ., ., HH   ., .,k 6;k +LabelMEMSChip ., .,XX .,@hh@@ .,xxx .,hh(( .,xhxhx .,hh .,(( .,x(x(x .,(( .,xxxxx ., .,``` ., .,    ., ( (  .,vvv .,v(v(v ., x @x @ x .,@xhxh@@x ., .,xhxhx .,hh .,(PP(( .,(( ., .,xxx .,88 ., .,HppHH .,H(H(H .,HHH .,  @ @   .,    ., @ @   ., @ @( (  ., P x x P P .,    ., x x( (  ., x x   ., ~ 2 ~2 ~  ., t  < t< t ., j  F jF j ., BF jF jn Bn BF ., L< t< td Ld L< ., V2 ~2 ~Z VZ V2 ., `( ( P `P `( ., 8P `P `x 8x 8P ., ( (  ., x x   x ., x x  x .,     .,  8 8   .,   ., .,  (( .,   .,XX(( ., .,0XX00 ., ., .,@hh@@ ., .,hh(( .,xxx .,(( .,(( ., ., HH   .,xxx .,HH(( .,xHxHx .,HH ., .,00 .,XXX .,00 ., ., .,xxx .,(( .,xhxhx ., .,  22  .,<< .,FF .,jFFnjnjF .,t<<dtdt< .,~22Z~Z~2 .,((PP( .,`PPx`x`P .,(( .,PPP .,xx ., .,PxxPP .,(( .,xxx .,8xx88x .,888 .,8``88 .,    ., h 0 0( h( h ., h 0 0 h h ., ( (  ., X  X X .,    .,    ., X  X Xk k LabelChip LabelAMI5 #< Label5n1SRM ~ LabelMEMSChip k $*k % dashr .,<<g 2g 2.Arr .,<PPP<P< .,PP .,<<PP< .,k-kLabelFOAA_rrr dashr < Arr | Arr  .,xddxxd .,ddd ., .,ddxxd .,<PP<<<< .,PP .,k k #7step_aaFO_r LabelFOAA_rrr \ ., > >  +,    +,HH   +,HH +,> H H>>  3,HH 4,88g  g FO 0 d F g  g  A .,<P<PPP< .,xPxPx .,<PP<< .,g  g AA A d A k &7k .LabelFOAA FO  dash < AA k k -step_aaFO_rr LabelFOAA ` .,       +,   +, +,      +,    3, 4,k9$k9LabelAAFO_rrr dashr < Arr d Arr  .,x||xx| .,||| ., .,||| .,<PPT<T< .,hh .,,,k k +step_aaFO_rrr LabelAAFO_rrr ` .,       +, +, +,   +, 3, 4,k k %LabelAAFO dash < FO @ AA k 5#k step_aaFO LabelAAFO  ., t t  +, +,tt~~t +,tt +,tt 3,~~ 4,nnk :k /0 stepquad step_aaFO_r  step_aaFO_rr  step_aaFO_rrr  step_aaFO `k ,k 1"stepquad3 stepquad  3 k 4k #LabelStepHeight ., ., xHxH  x ., xx x .,(( .,00 ., .,00(( .,x0x0x .,00 ., .,XXX .,XxxXXx ., .,hh(( .,hh ., ., .,xxx .,xx(( .,xPxPx .,xx .,88 .,xxx .,x x x ., .,x x x .,   ., .,xxx .,XX(( .,x0x0x .,XX .,@@ ., .,ppp .,    .,xxx .,x(x(x .,(( .,xxx .,k-k 1stepquad2 stepquad  2 k+k 0stepquad1 stepquad  1 g 8k (StepHeight stepquad3 6 LabelStepHeight H stepquad2 H6 stepquad1 6 .,((  .,(( .,    -,b b bg  k ( frame .,+>,+>,+f+f+> -,,,,-,-, -,-,-,--- -,,,(( -,((--g  k  AMI5 Certification  InPlaneLength b YoungsModulus  StrainGradient F. ResidualStrain ) LabelChip H, StepHeight b frame